3D Simulation for Melt Laser Anneal Integration in FinFET’s Contact

Toshiyuki Tabata, Benoit Curvers, Karim Huet, Soon Aik Chew, Jean-Luc Everaert, Naoto Horiguchi

Open source

DOI: 10.1109/jeds.2020.3030923
Published: 2020
Container: IEEE Journal of the Electron Devices Society
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1109/jeds.2020.3030923,
  title = {3D Simulation for Melt Laser Anneal Integration in FinFET’s Contact},
  author = {Toshiyuki Tabata and Benoit Curvers and Karim Huet and Soon Aik Chew and Jean-Luc Everaert and Naoto Horiguchi},
  year = {2020},
  journal = {IEEE Journal of the Electron Devices Society},
  doi = {10.1109/jeds.2020.3030923},
  url = {https://doi.org/10.1109/jeds.2020.3030923}
}

RIS

TY  - JOUR
TI  - 3D Simulation for Melt Laser Anneal Integration in FinFET’s Contact
AU  - Toshiyuki Tabata
AU  - Benoit Curvers
AU  - Karim Huet
AU  - Soon Aik Chew
AU  - Jean-Luc Everaert
AU  - Naoto Horiguchi
PY  - 2020
JO  - IEEE Journal of the Electron Devices Society
DO  - 10.1109/jeds.2020.3030923
UR  - https://doi.org/10.1109/jeds.2020.3030923
ER  -

APA

Tabata, T., Curvers, B., Huet, K., Chew, S. A., Everaert, J., & Horiguchi, N. (2020). 3D Simulation for Melt Laser Anneal Integration in FinFET’s Contact. IEEE Journal of the Electron Devices Society. https://doi.org/10.1109/jeds.2020.3030923

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crossref · retrieved 2026-09-27T08:12:22.600Z