Direct Defect-Level Analysis of Metal–Insulator–Metal Capacitor Using Internal Photoemission Spectroscopy

Tae Jin Yoo, Hyeon Jun Hwang, Soo Cheol Kang, Sunwoo Heo, Ho-In Lee, Young Gon Lee, Hokyung Park, Byoung Hun Lee

Open source

DOI
10.1109/jeds.2021.3073220
Published
2021
Container
IEEE Journal of the Electron Devices Society
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Open access
unknown

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BibTeX

@article{allodium:10.1109/jeds.2021.3073220,
  title = {Direct Defect-Level Analysis of Metal–Insulator–Metal Capacitor Using Internal Photoemission Spectroscopy},
  author = {Tae Jin Yoo and Hyeon Jun Hwang and Soo Cheol Kang and Sunwoo Heo and Ho-In Lee and Young Gon Lee and Hokyung Park and Byoung Hun Lee},
  year = {2021},
  journal = {IEEE Journal of the Electron Devices Society},
  doi = {10.1109/jeds.2021.3073220},
  url = {https://doi.org/10.1109/jeds.2021.3073220}
}

RIS

TY  - JOUR
TI  - Direct Defect-Level Analysis of Metal–Insulator–Metal Capacitor Using Internal Photoemission Spectroscopy
AU  - Tae Jin Yoo
AU  - Hyeon Jun Hwang
AU  - Soo Cheol Kang
AU  - Sunwoo Heo
AU  - Ho-In Lee
AU  - Young Gon Lee
AU  - Hokyung Park
AU  - Byoung Hun Lee
PY  - 2021
JO  - IEEE Journal of the Electron Devices Society
DO  - 10.1109/jeds.2021.3073220
UR  - https://doi.org/10.1109/jeds.2021.3073220
ER  - 

APA

Yoo, T. J., Hwang, H. J., Kang, S. C., Heo, S., Lee, H., Lee, Y. G., Park, H., & Lee, B. H. (2021). Direct Defect-Level Analysis of Metal–Insulator–Metal Capacitor Using Internal Photoemission Spectroscopy. IEEE Journal of the Electron Devices Society. https://doi.org/10.1109/jeds.2021.3073220

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