Real-Time ESD Monitoring and Control in Semiconductor Manufacturing Environments With Silicon Chip of ESD Event Detection
- DOI
- 10.1109/jeds.2025.3548886
- Published
- 2025
- Container
- IEEE Journal of the Electron Devices Society
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Open access
- unknown
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Cite this work
BibTeX
@article{allodium:10.1109/jeds.2025.3548886,
title = {Real-Time ESD Monitoring and Control in Semiconductor Manufacturing Environments With Silicon Chip of ESD Event Detection},
author = {Chang-Jiun Lai and Ming-Dou Ker},
year = {2025},
journal = {IEEE Journal of the Electron Devices Society},
doi = {10.1109/jeds.2025.3548886},
url = {https://doi.org/10.1109/jeds.2025.3548886}
}RIS
TY - JOUR TI - Real-Time ESD Monitoring and Control in Semiconductor Manufacturing Environments With Silicon Chip of ESD Event Detection AU - Chang-Jiun Lai AU - Ming-Dou Ker PY - 2025 JO - IEEE Journal of the Electron Devices Society DO - 10.1109/jeds.2025.3548886 UR - https://doi.org/10.1109/jeds.2025.3548886 ER -
APA
Lai, C., & Ker, M. (2025). Real-Time ESD Monitoring and Control in Semiconductor Manufacturing Environments With Silicon Chip of ESD Event Detection. IEEE Journal of the Electron Devices Society. https://doi.org/10.1109/jeds.2025.3548886
Source records
- crossref · retrieved 2026-11-10T12:41:00.327Z