New On-Chip Nanomechanical Testing Laboratory - Applications to Aluminum and Polysilicon Thin Films
- DOI
- 10.1109/jmems.2009.2020380
- Published
- 2009-06
- Container
- Journal of Microelectromechanical Systems
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Open access
- unknown
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Cite this work
BibTeX
@article{allodium:10.1109/jmems.2009.2020380,
title = {New On-Chip Nanomechanical Testing Laboratory - Applications to Aluminum and Polysilicon Thin Films},
author = {S. Gravier and M. Coulombier and A. Safi and N. Andre and A. Boe and J.-P. Raskin and T. Pardoen},
year = {2009},
journal = {Journal of Microelectromechanical Systems},
doi = {10.1109/jmems.2009.2020380},
url = {https://doi.org/10.1109/jmems.2009.2020380}
}RIS
TY - JOUR TI - New On-Chip Nanomechanical Testing Laboratory - Applications to Aluminum and Polysilicon Thin Films AU - S. Gravier AU - M. Coulombier AU - A. Safi AU - N. Andre AU - A. Boe AU - J.-P. Raskin AU - T. Pardoen PY - 2009 JO - Journal of Microelectromechanical Systems DO - 10.1109/jmems.2009.2020380 UR - https://doi.org/10.1109/jmems.2009.2020380 ER -
APA
Gravier, S., Coulombier, M., Safi, A., Andre, N., Boe, A., Raskin, J., & Pardoen, T. (2009). New On-Chip Nanomechanical Testing Laboratory - Applications to Aluminum and Polysilicon Thin Films. Journal of Microelectromechanical Systems. https://doi.org/10.1109/jmems.2009.2020380
Source records
- crossref · retrieved 2026-09-25T06:33:59.864Z