Compact, Scan-Pattern-Switchable 2-D Piezoelectric MEMS Mirror With 1-D Addressable Scanning

Joonyoung Yu, Yi Zhu, Mayur Birla, Miki Lee, Yiwei Yang, Evgueni Filipov, Thomas D. Wang, Kenn R. Oldham

Open source

DOI: 10.1109/jmems.2026.3652017
Published: 2026-04
Container: Journal of Microelectromechanical Systems
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1109/jmems.2026.3652017,
  title = {Compact, Scan-Pattern-Switchable 2-D Piezoelectric MEMS Mirror With 1-D Addressable Scanning},
  author = {Joonyoung Yu and Yi Zhu and Mayur Birla and Miki Lee and Yiwei Yang and Evgueni Filipov and Thomas D. Wang and Kenn R. Oldham},
  year = {2026},
  journal = {Journal of Microelectromechanical Systems},
  doi = {10.1109/jmems.2026.3652017},
  url = {https://doi.org/10.1109/jmems.2026.3652017}
}

RIS

TY  - JOUR
TI  - Compact, Scan-Pattern-Switchable 2-D Piezoelectric MEMS Mirror With 1-D Addressable Scanning
AU  - Joonyoung Yu
AU  - Yi Zhu
AU  - Mayur Birla
AU  - Miki Lee
AU  - Yiwei Yang
AU  - Evgueni Filipov
AU  - Thomas D. Wang
AU  - Kenn R. Oldham
PY  - 2026
JO  - Journal of Microelectromechanical Systems
DO  - 10.1109/jmems.2026.3652017
UR  - https://doi.org/10.1109/jmems.2026.3652017
ER  -

APA

Yu, J., Zhu, Y., Birla, M., Lee, M., Yang, Y., Filipov, E., Wang, T. D., & Oldham, K. R. (2026). Compact, Scan-Pattern-Switchable 2-D Piezoelectric MEMS Mirror With 1-D Addressable Scanning. Journal of Microelectromechanical Systems. https://doi.org/10.1109/jmems.2026.3652017

Source records

crossref · retrieved 2026-09-25T06:04:42.086Z