Subtractive Nanofluidics in 65-nm CMOS Copper BEOL Achieve 100-nm Width
- DOI
- 10.1109/mems64181.2026.11419275
- Published
- 2026-01-25
- Container
- 2026 IEEE 39th International Conference on Micro Electro Mechanical Systems (MEMS)
- Publisher
- IEEE
- Open access
- unknown
Credibility signals
uncertain Score 64/100 under policy 1.0.0. This is a metadata assessment, not a judgment of the paper's conclusions.
Show all credibility signals
- supportingDOI registered: A matching record was returned by Crossref.
- supportingDOI resolves: A matching record was returned by Crossref.
- not scoredDirectory of Open Access Journals: No matching DOAJ record was present in this response. No allow-list match; this is not evidence of low credibility.
- not scoredMEDLINE indexed: Not checked or no result supplied; no credibility inference made.
- not scoredOpenAlex core source: Not checked or no result supplied; no credibility inference made.
- not scoredKnown publisher allow-list: Not checked or no result supplied; no credibility inference made.
- not scoredROR affiliation: Not checked or no result supplied; no credibility inference made.
- not scoredRetraction Watch retraction: No retraction notice matched this DOI in the deployed snapshot. No matching event found; coverage may be incomplete.
- not scoredRetraction Watch expression of concern: No expression of concern notice matched this DOI in the deployed snapshot. No matching event found; coverage may be incomplete.
- not scoredRetraction Watch correction: No correction notice matched this DOI in the deployed snapshot. No matching event found; coverage may be incomplete.
- not scoredRetraction Watch reinstatement: No reinstatement notice matched this DOI in the deployed snapshot. No matching event found; coverage may be incomplete.
- not scoredOpen access status: Not checked or no result supplied; no credibility inference made.
- not scoredPublication license: Not checked or no result supplied; no credibility inference made.
- not scoredPublication version: A publication version was supplied but is not scored.
- supportingMetadata completeness: All 6 scored descriptive metadata groups are present.
Cite this work
BibTeX
@article{allodium:10.1109/mems64181.2026.11419275,
title = {Subtractive Nanofluidics in 65-nm CMOS Copper BEOL Achieve 100-nm Width},
author = {Alexander Di and Michael Pedowitz and Jun-Chau Chien},
year = {2026},
journal = {2026 IEEE 39th International Conference on Micro Electro Mechanical Systems (MEMS)},
doi = {10.1109/mems64181.2026.11419275},
url = {https://doi.org/10.1109/mems64181.2026.11419275}
}RIS
TY - JOUR TI - Subtractive Nanofluidics in 65-nm CMOS Copper BEOL Achieve 100-nm Width AU - Alexander Di AU - Michael Pedowitz AU - Jun-Chau Chien PY - 2026 JO - 2026 IEEE 39th International Conference on Micro Electro Mechanical Systems (MEMS) DO - 10.1109/mems64181.2026.11419275 UR - https://doi.org/10.1109/mems64181.2026.11419275 ER -
APA
Di, A., Pedowitz, M., & Chien, J. (2026). Subtractive Nanofluidics in 65-nm CMOS Copper BEOL Achieve 100-nm Width. 2026 IEEE 39th International Conference on Micro Electro Mechanical Systems (MEMS). https://doi.org/10.1109/mems64181.2026.11419275
Source records
- crossref · retrieved 2026-09-26T01:02:32.970Z