Nanofabrication with Ultrasonic Nanoimprint Lithography

Chien-Hung Lin, Rongshun Chen

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DOI
10.1109/nano.2006.1717175
Published
Not recorded
Container
2006 Sixth IEEE Conference on Nanotechnology
Publisher
IEEE
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unknown

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BibTeX

@article{allodium:10.1109/nano.2006.1717175,
  title = {Nanofabrication with Ultrasonic Nanoimprint Lithography},
  author = {Chien-Hung Lin and Rongshun Chen},
  journal = {2006 Sixth IEEE Conference on Nanotechnology},
  doi = {10.1109/nano.2006.1717175},
  url = {https://doi.org/10.1109/nano.2006.1717175}
}

RIS

TY  - JOUR
TI  - Nanofabrication with Ultrasonic Nanoimprint Lithography
AU  - Chien-Hung Lin
AU  - Rongshun Chen
JO  - 2006 Sixth IEEE Conference on Nanotechnology
DO  - 10.1109/nano.2006.1717175
UR  - https://doi.org/10.1109/nano.2006.1717175
ER  - 

APA

Lin, C., & Chen, R. (n.d.). Nanofabrication with Ultrasonic Nanoimprint Lithography. 2006 Sixth IEEE Conference on Nanotechnology. https://doi.org/10.1109/nano.2006.1717175

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