Notice of Retraction Failure mode identification using thermal data based on mixed effects model in chemical mechanical planarization process
- DOI
- 10.1109/qr2mse.2013.6625700
- Published
- 2013-07
- Container
- 2013 International Conference on Quality, Reliability, Risk, Maintenance, and Safety Engineering (QR2MSE)
- Publisher
- IEEE
- Open access
- unknown
Credibility signals
serious concern Score 29/100 under policy 1.0.0. This is a metadata assessment, not a judgment of the paper's conclusions.
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- supportingDOI registered: A matching record was returned by Crossref.
- supportingDOI resolves: A matching record was returned by Crossref.
- not scoredDirectory of Open Access Journals: No matching DOAJ record was present in this response. No allow-list match; this is not evidence of low credibility.
- not scoredMEDLINE indexed: Not checked or no result supplied; no credibility inference made.
- not scoredOpenAlex core source: Not checked or no result supplied; no credibility inference made.
- not scoredKnown publisher allow-list: Not checked or no result supplied; no credibility inference made.
- not scoredROR affiliation: Not checked or no result supplied; no credibility inference made.
- serious concernRetraction Watch retraction: 1 retraction notice matched this DOI.
- not scoredRetraction Watch expression of concern: No expression of concern notice matched this DOI in the deployed snapshot. No matching event found; coverage may be incomplete.
- not scoredRetraction Watch correction: No correction notice matched this DOI in the deployed snapshot. No matching event found; coverage may be incomplete.
- not scoredRetraction Watch reinstatement: No reinstatement notice matched this DOI in the deployed snapshot. No matching event found; coverage may be incomplete.
- not scoredOpen access status: Not checked or no result supplied; no credibility inference made.
- not scoredPublication license: Not checked or no result supplied; no credibility inference made.
- not scoredPublication version: A publication version was supplied but is not scored.
- supportingMetadata completeness: All 6 scored descriptive metadata groups are present.
Cite this work
BibTeX
@article{allodium:10.1109/qr2mse.2013.6625700,
title = {Notice of Retraction Failure mode identification using thermal data based on mixed effects model in chemical mechanical planarization process},
author = {Tao Liu and Xi Zhang},
year = {2013},
journal = {2013 International Conference on Quality, Reliability, Risk, Maintenance, and Safety Engineering (QR2MSE)},
doi = {10.1109/qr2mse.2013.6625700},
url = {https://doi.org/10.1109/qr2mse.2013.6625700}
}RIS
TY - JOUR TI - Notice of Retraction Failure mode identification using thermal data based on mixed effects model in chemical mechanical planarization process AU - Tao Liu AU - Xi Zhang PY - 2013 JO - 2013 International Conference on Quality, Reliability, Risk, Maintenance, and Safety Engineering (QR2MSE) DO - 10.1109/qr2mse.2013.6625700 UR - https://doi.org/10.1109/qr2mse.2013.6625700 ER -
APA
Liu, T., & Zhang, X. (2013). Notice of Retraction Failure mode identification using thermal data based on mixed effects model in chemical mechanical planarization process. 2013 International Conference on Quality, Reliability, Risk, Maintenance, and Safety Engineering (QR2MSE). https://doi.org/10.1109/qr2mse.2013.6625700
Source records
- crossref · retrieved 2026-09-26T14:59:26.721Z