High-Q and low-RM 24-MHz radial-contour mode disk resonators fabricated with silicon passive integration technology

M. Sworowski, F. Neuilly, Bernard Legrand, A. Summanwar, F. Lallemand, P. Philippe, L. Buchaillot

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DOI
10.1109/sensor.2009.5285623
Published
2009
Container
Not recorded
Publisher
_
Open access
no

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BibTeX

@article{allodium:10.1109/sensor.2009.5285623,
  title = {High-Q and low-RM 24-MHz radial-contour mode disk resonators fabricated with silicon passive integration technology},
  author = {M. Sworowski and F. Neuilly and Bernard Legrand and A. Summanwar and F. Lallemand and P. Philippe and L. Buchaillot},
  year = {2009},
  doi = {10.1109/sensor.2009.5285623},
  url = {https://doi.org/10.1109/sensor.2009.5285623}
}

RIS

TY  - JOUR
TI  - High-Q and low-RM 24-MHz radial-contour mode disk resonators fabricated with silicon passive integration technology
AU  - M. Sworowski
AU  - F. Neuilly
AU  - Bernard Legrand
AU  - A. Summanwar
AU  - F. Lallemand
AU  - P. Philippe
AU  - L. Buchaillot
PY  - 2009
DO  - 10.1109/sensor.2009.5285623
UR  - https://doi.org/10.1109/sensor.2009.5285623
ER  - 

APA

Sworowski, M., Neuilly, F., Legrand, B., Summanwar, A., Lallemand, F., Philippe, P., & Buchaillot, L. (2009). High-Q and low-RM 24-MHz radial-contour mode disk resonators fabricated with silicon passive integration technology. https://doi.org/10.1109/sensor.2009.5285623

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