High-Q and low-RM 24-MHz radial-contour mode disk resonators fabricated with silicon passive integration technology
- DOI
- 10.1109/sensor.2009.5285623
- Published
- 2009
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- Not recorded
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- _
- Open access
- no
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BibTeX
@article{allodium:10.1109/sensor.2009.5285623,
title = {High-Q and low-RM 24-MHz radial-contour mode disk resonators fabricated with silicon passive integration technology},
author = {M. Sworowski and F. Neuilly and Bernard Legrand and A. Summanwar and F. Lallemand and P. Philippe and L. Buchaillot},
year = {2009},
doi = {10.1109/sensor.2009.5285623},
url = {https://doi.org/10.1109/sensor.2009.5285623}
}RIS
TY - JOUR TI - High-Q and low-RM 24-MHz radial-contour mode disk resonators fabricated with silicon passive integration technology AU - M. Sworowski AU - F. Neuilly AU - Bernard Legrand AU - A. Summanwar AU - F. Lallemand AU - P. Philippe AU - L. Buchaillot PY - 2009 DO - 10.1109/sensor.2009.5285623 UR - https://doi.org/10.1109/sensor.2009.5285623 ER -
APA
Sworowski, M., Neuilly, F., Legrand, B., Summanwar, A., Lallemand, F., Philippe, P., & Buchaillot, L. (2009). High-Q and low-RM 24-MHz radial-contour mode disk resonators fabricated with silicon passive integration technology. https://doi.org/10.1109/sensor.2009.5285623
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- hal · retrieved 2026-09-27T00:21:12.889Z