Piezoelectric thin films: evaluation of electrical and electromechanical characteristics for MEMS devices

K. Prume, P. Muralt, F. Calame, T. Schmitz-Kempen, S. Tiedke

Open source

DOI
10.1109/tuffc.2007.206
Published
2007-01
Container
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Open access
unknown

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BibTeX

@article{allodium:10.1109/tuffc.2007.206,
  title = {Piezoelectric thin films: evaluation of electrical and electromechanical characteristics for MEMS devices},
  author = {K. Prume and P. Muralt and F. Calame and T. Schmitz-Kempen and S. Tiedke},
  year = {2007},
  journal = {IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control},
  doi = {10.1109/tuffc.2007.206},
  url = {https://doi.org/10.1109/tuffc.2007.206}
}

RIS

TY  - JOUR
TI  - Piezoelectric thin films: evaluation of electrical and electromechanical characteristics for MEMS devices
AU  - K. Prume
AU  - P. Muralt
AU  - F. Calame
AU  - T. Schmitz-Kempen
AU  - S. Tiedke
PY  - 2007
JO  - IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
DO  - 10.1109/tuffc.2007.206
UR  - https://doi.org/10.1109/tuffc.2007.206
ER  - 

APA

Prume, K., Muralt, P., Calame, F., Schmitz-Kempen, T., & Tiedke, S. (2007). Piezoelectric thin films: evaluation of electrical and electromechanical characteristics for MEMS devices. IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control. https://doi.org/10.1109/tuffc.2007.206

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