Piezoelectric thin films: evaluation of electrical and electromechanical characteristics for MEMS devices
- DOI
- 10.1109/tuffc.2007.206
- Published
- 2007-01
- Container
- IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Open access
- unknown
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Cite this work
BibTeX
@article{allodium:10.1109/tuffc.2007.206,
title = {Piezoelectric thin films: evaluation of electrical and electromechanical characteristics for MEMS devices},
author = {K. Prume and P. Muralt and F. Calame and T. Schmitz-Kempen and S. Tiedke},
year = {2007},
journal = {IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control},
doi = {10.1109/tuffc.2007.206},
url = {https://doi.org/10.1109/tuffc.2007.206}
}RIS
TY - JOUR TI - Piezoelectric thin films: evaluation of electrical and electromechanical characteristics for MEMS devices AU - K. Prume AU - P. Muralt AU - F. Calame AU - T. Schmitz-Kempen AU - S. Tiedke PY - 2007 JO - IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control DO - 10.1109/tuffc.2007.206 UR - https://doi.org/10.1109/tuffc.2007.206 ER -
APA
Prume, K., Muralt, P., Calame, F., Schmitz-Kempen, T., & Tiedke, S. (2007). Piezoelectric thin films: evaluation of electrical and electromechanical characteristics for MEMS devices. IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control. https://doi.org/10.1109/tuffc.2007.206
Source records
- crossref · retrieved 2026-09-25T12:20:35.437Z