Heat-depolymerizable polycarbonates as electron beam patternable sacrificial layers for nanofluidics
- DOI
- 10.1116/1.1409383
- Published
- 2001-11-01
- Container
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
- Publisher
- American Vacuum Society
- Open access
- unknown
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Cite this work
BibTeX
@article{allodium:10.1116/1.1409383,
title = {Heat-depolymerizable polycarbonates as electron beam patternable sacrificial layers for nanofluidics},
author = {C. K. Harnett and G. W. Coates and H. G. Craighead},
year = {2001},
journal = {Journal of Vacuum Science \& Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena},
doi = {10.1116/1.1409383},
url = {https://doi.org/10.1116/1.1409383}
}RIS
TY - JOUR TI - Heat-depolymerizable polycarbonates as electron beam patternable sacrificial layers for nanofluidics AU - C. K. Harnett AU - G. W. Coates AU - H. G. Craighead PY - 2001 JO - Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena DO - 10.1116/1.1409383 UR - https://doi.org/10.1116/1.1409383 ER -
APA
Harnett, C. K., Coates, G. W., & Craighead, H. G. (2001). Heat-depolymerizable polycarbonates as electron beam patternable sacrificial layers for nanofluidics. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena. https://doi.org/10.1116/1.1409383
Source records
- crossref · retrieved 2026-09-25T10:16:43.733Z