Room temperature replication in spin on glass by nanoimprint technology
- DOI
- 10.1116/1.1417547
- Published
- 2001-11-01
- Container
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
- Publisher
- American Vacuum Society
- Open access
- unknown
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Cite this work
BibTeX
@article{allodium:10.1116/1.1417547,
title = {Room temperature replication in spin on glass by nanoimprint technology},
author = {S. Matsui and Y. Igaku and H. Ishigaki and J. Fujita and M. Ishida and Y. Ochiai and M. Komuro and H. Hiroshima},
year = {2001},
journal = {Journal of Vacuum Science \& Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena},
doi = {10.1116/1.1417547},
url = {https://doi.org/10.1116/1.1417547}
}RIS
TY - JOUR TI - Room temperature replication in spin on glass by nanoimprint technology AU - S. Matsui AU - Y. Igaku AU - H. Ishigaki AU - J. Fujita AU - M. Ishida AU - Y. Ochiai AU - M. Komuro AU - H. Hiroshima PY - 2001 JO - Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena DO - 10.1116/1.1417547 UR - https://doi.org/10.1116/1.1417547 ER -
APA
Matsui, S., Igaku, Y., Ishigaki, H., Fujita, J., Ishida, M., Ochiai, Y., Komuro, M., & Hiroshima, H. (2001). Room temperature replication in spin on glass by nanoimprint technology. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena. https://doi.org/10.1116/1.1417547
Source records
- crossref · retrieved 2026-09-26T03:15:07.767Z