Multimodal imaging technology by integrated scanning electron, force, and microwave microscopy and its application to study microscaled capacitors

Olaf C Haenssler, Sergej Fatikow, Didier Theron

Open source

DOI
10.1116/1.5006161
Published
2018
Container
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics
Publisher
Not recorded
Open access
yes

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BibTeX

@article{allodium:10.1116/1.5006161,
  title = {Multimodal imaging technology by integrated scanning electron, force, and microwave microscopy and its application to study microscaled capacitors},
  author = {Olaf C Haenssler and Sergej Fatikow and Didier Theron},
  year = {2018},
  journal = {Journal of Vacuum Science \& Technology B, Nanotechnology and Microelectronics},
  doi = {10.1116/1.5006161},
  url = {https://doi.org/10.1116/1.5006161}
}

RIS

TY  - JOUR
TI  - Multimodal imaging technology by integrated scanning electron, force, and microwave microscopy and its application to study microscaled capacitors
AU  - Olaf C Haenssler
AU  - Sergej Fatikow
AU  - Didier Theron
PY  - 2018
JO  - Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics
DO  - 10.1116/1.5006161
UR  - https://doi.org/10.1116/1.5006161
ER  - 

APA

Haenssler, O. C., Fatikow, S., & Theron, D. (2018). Multimodal imaging technology by integrated scanning electron, force, and microwave microscopy and its application to study microscaled capacitors. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics. https://doi.org/10.1116/1.5006161

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