Multimodal imaging technology by integrated scanning electron, force, and microwave microscopy and its application to study microscaled capacitors
- DOI
- 10.1116/1.5006161
- Published
- 2018
- Container
- Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics
- Publisher
- Not recorded
- Open access
- yes
Credibility signals
limited evidence Score 45/100 under policy 1.0.0. This is a metadata assessment, not a judgment of the paper's conclusions.
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Cite this work
BibTeX
@article{allodium:10.1116/1.5006161,
title = {Multimodal imaging technology by integrated scanning electron, force, and microwave microscopy and its application to study microscaled capacitors},
author = {Olaf C Haenssler and Sergej Fatikow and Didier Theron},
year = {2018},
journal = {Journal of Vacuum Science \& Technology B, Nanotechnology and Microelectronics},
doi = {10.1116/1.5006161},
url = {https://doi.org/10.1116/1.5006161}
}RIS
TY - JOUR TI - Multimodal imaging technology by integrated scanning electron, force, and microwave microscopy and its application to study microscaled capacitors AU - Olaf C Haenssler AU - Sergej Fatikow AU - Didier Theron PY - 2018 JO - Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics DO - 10.1116/1.5006161 UR - https://doi.org/10.1116/1.5006161 ER -
APA
Haenssler, O. C., Fatikow, S., & Theron, D. (2018). Multimodal imaging technology by integrated scanning electron, force, and microwave microscopy and its application to study microscaled capacitors. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics. https://doi.org/10.1116/1.5006161
Source records
- hal · retrieved 2026-09-25T12:58:50.257Z