Expanding DSA process window with atmospheric control

Nathalie Frolet, Maxime Argoud, Charlotte Bouet, Karine Jullian, Yuji Tanaka, Chisayo Mori, You Arisawa, Tomohiro Motono, Masahiko Harumoto, Harolod Stokes, Masaya Asai, Raluca Tiron

Open source

DOI: 10.1117/12.2561259
Published: 2020-03
Container: Not recorded
Publisher: SPIE
Open access: no

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Cite this work

BibTeX

@article{allodium:10.1117/12.2561259,
  title = {Expanding DSA process window with atmospheric control},
  author = {Nathalie Frolet and Maxime Argoud and Charlotte Bouet and Karine Jullian and Yuji Tanaka and Chisayo Mori and You Arisawa and Tomohiro Motono and Masahiko Harumoto and Harolod Stokes and Masaya Asai and Raluca Tiron},
  year = {2020},
  doi = {10.1117/12.2561259},
  url = {https://doi.org/10.1117/12.2561259}
}

RIS

TY  - JOUR
TI  - Expanding DSA process window with atmospheric control
AU  - Nathalie Frolet
AU  - Maxime Argoud
AU  - Charlotte Bouet
AU  - Karine Jullian
AU  - Yuji Tanaka
AU  - Chisayo Mori
AU  - You Arisawa
AU  - Tomohiro Motono
AU  - Masahiko Harumoto
AU  - Harolod Stokes
AU  - Masaya Asai
AU  - Raluca Tiron
PY  - 2020
DO  - 10.1117/12.2561259
UR  - https://doi.org/10.1117/12.2561259
ER  -

APA

Frolet, N., Argoud, M., Bouet, C., Jullian, K., Tanaka, Y., Mori, C., Arisawa, Y., Motono, T., Harumoto, M., Stokes, H., Asai, M., & Tiron, R. (2020). Expanding DSA process window with atmospheric control. https://doi.org/10.1117/12.2561259

Source records

hal · retrieved 2026-09-27T02:43:08.124Z