Contour metrology accuracy assessment using TMU analysis

Nivea Schuch, Mohamed Abaidi, Thiago Figueiro, Patrick Schiavone, Matthew Sendelbach

DOI: 10.1117/12.2584617
Published: 2021-02-22
Container: Not recorded
Publisher: SPIE
Open access: no

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Cite this work

BibTeX

@article{allodium:10.1117/12.2584617,
  title = {Contour metrology accuracy assessment using TMU analysis},
  author = {Nivea Schuch and Mohamed Abaidi and Thiago Figueiro and Patrick Schiavone and Matthew Sendelbach},
  year = {2021},
  doi = {10.1117/12.2584617},
  url = {https://doi.org/10.1117/12.2584617}
}

RIS

TY  - JOUR
TI  - Contour metrology accuracy assessment using TMU analysis
AU  - Nivea Schuch
AU  - Mohamed Abaidi
AU  - Thiago Figueiro
AU  - Patrick Schiavone
AU  - Matthew Sendelbach
PY  - 2021
DO  - 10.1117/12.2584617
UR  - https://doi.org/10.1117/12.2584617
ER  -

APA

Schuch, N., Abaidi, M., Figueiro, T., Schiavone, P., & Sendelbach, M. (2021). Contour metrology accuracy assessment using TMU analysis. https://doi.org/10.1117/12.2584617

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hal · retrieved 2026-09-26T12:21:45.124Z