Laser interference and nanospheres UV lithography to produce micro and nanostructured TiO2 and TiN based sol-gel layers
- DOI
- 10.1117/12.2635170
- Published
- 2022-10-03
- Container
- Not recorded
- Publisher
- SPIE
- Open access
- no
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BibTeX
@article{allodium:10.1117/12.2635170,
title = {Laser interference and nanospheres UV lithography to produce micro and nanostructured TiO2 and TiN based sol-gel layers},
author = {Yves Jourlin and Nicolas Crespo-Monteiro and Victor Vallejo Otero and Marie Traynar and Maria Usuga Higuita and Emilie Gamet},
year = {2022},
doi = {10.1117/12.2635170},
url = {https://doi.org/10.1117/12.2635170}
}RIS
TY - JOUR TI - Laser interference and nanospheres UV lithography to produce micro and nanostructured TiO2 and TiN based sol-gel layers AU - Yves Jourlin AU - Nicolas Crespo-Monteiro AU - Victor Vallejo Otero AU - Marie Traynar AU - Maria Usuga Higuita AU - Emilie Gamet PY - 2022 DO - 10.1117/12.2635170 UR - https://doi.org/10.1117/12.2635170 ER -
APA
Jourlin, Y., Crespo-Monteiro, N., Otero, V. V., Traynar, M., Higuita, M. U., & Gamet, E. (2022). Laser interference and nanospheres UV lithography to produce micro and nanostructured TiO2 and TiN based sol-gel layers. https://doi.org/10.1117/12.2635170