Manufacturing of 3D submicronic structures at wafer scale

Diana Fernandez Rodas, Jérôme Rêche, Ivanie Mendes, Raluca Tiron

Open source

DOI: 10.1117/12.3009978
Published: 2024-04-09
Container: Novel Patterning Technologies 2024
Publisher: SPIE
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1117/12.3009978,
  title = {Manufacturing of 3D submicronic structures at wafer scale},
  author = {Diana Fernandez Rodas and Jérôme Rêche and Ivanie Mendes and Raluca Tiron},
  year = {2024},
  journal = {Novel Patterning Technologies 2024},
  doi = {10.1117/12.3009978},
  url = {https://doi.org/10.1117/12.3009978}
}

RIS

TY  - JOUR
TI  - Manufacturing of 3D submicronic structures at wafer scale
AU  - Diana Fernandez Rodas
AU  - Jérôme Rêche
AU  - Ivanie Mendes
AU  - Raluca Tiron
PY  - 2024
JO  - Novel Patterning Technologies 2024
DO  - 10.1117/12.3009978
UR  - https://doi.org/10.1117/12.3009978
ER  -

APA

Rodas, D. F., Rêche, J., Mendes, I., & Tiron, R. (2024). Manufacturing of 3D submicronic structures at wafer scale. Novel Patterning Technologies 2024. https://doi.org/10.1117/12.3009978

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crossref · retrieved 2026-09-24T18:59:18.434Z