ASET development of at-wavelength phase-shifting point diffraction interferometer

Katsumi Sugisaki, Yucong Zhu, Yoshio Gomei, Masahito Niibe

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DOI: 10.1117/12.472344
Published: 2002-07-05
Container: SPIE Proceedings
Publisher: SPIE
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1117/12.472344,
  title = {ASET development of at-wavelength phase-shifting point diffraction interferometer},
  author = {Katsumi Sugisaki and Yucong Zhu and Yoshio Gomei and Masahito Niibe},
  year = {2002},
  journal = {SPIE Proceedings},
  doi = {10.1117/12.472344},
  url = {https://doi.org/10.1117/12.472344}
}

RIS

TY  - JOUR
TI  - ASET development of at-wavelength phase-shifting point diffraction interferometer
AU  - Katsumi Sugisaki
AU  - Yucong Zhu
AU  - Yoshio Gomei
AU  - Masahito Niibe
PY  - 2002
JO  - SPIE Proceedings
DO  - 10.1117/12.472344
UR  - https://doi.org/10.1117/12.472344
ER  -

APA

Sugisaki, K., Zhu, Y., Gomei, Y., & Niibe, M. (2002). ASET development of at-wavelength phase-shifting point diffraction interferometer. SPIE Proceedings. https://doi.org/10.1117/12.472344

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crossref · retrieved 2026-09-26T22:30:22.417Z