Molecular-ion-beam-assisted deposition of stable SiOF films

Karin Scherer, Pascale Lacan, Aline Brunet-Bruneau, Herve Cado, Gerhard J. Keller, Richard Bosmans, Josette Rivory

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DOI: 10.1117/12.516072
Published: 2004-02-25
Container: SPIE Proceedings
Publisher: SPIE
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1117/12.516072,
  title = {Molecular-ion-beam-assisted deposition of stable SiOF films},
  author = {Karin Scherer and Pascale Lacan and Aline Brunet-Bruneau and Herve Cado and Gerhard J. Keller and Richard Bosmans and Josette Rivory},
  year = {2004},
  journal = {SPIE Proceedings},
  doi = {10.1117/12.516072},
  url = {https://doi.org/10.1117/12.516072}
}

RIS

TY  - JOUR
TI  - Molecular-ion-beam-assisted deposition of stable SiOF films
AU  - Karin Scherer
AU  - Pascale Lacan
AU  - Aline Brunet-Bruneau
AU  - Herve Cado
AU  - Gerhard J. Keller
AU  - Richard Bosmans
AU  - Josette Rivory
PY  - 2004
JO  - SPIE Proceedings
DO  - 10.1117/12.516072
UR  - https://doi.org/10.1117/12.516072
ER  -

APA

Scherer, K., Lacan, P., Brunet-Bruneau, A., Cado, H., Keller, G. J., Bosmans, R., & Rivory, J. (2004). Molecular-ion-beam-assisted deposition of stable SiOF films. SPIE Proceedings. https://doi.org/10.1117/12.516072

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crossref · retrieved 2026-11-06T14:44:51.261Z