Study of second-generation Proximity Gap Suction Development System (PGSD-II) for mask fabrication

Hideaki Sakurai, Masatoshi Terayama, Mari Sakai, Masamitsu Itoh, Osamu Ikenaga, Hideo Funakoshi, Norifumi Sato, Kenji Nakamizo, Masato Nomura, Yoshihiko Saito, Junji Nakao, Naoya Hayashi

Open source

DOI: 10.1117/12.801424
Published: 2008-10-24
Container: SPIE Proceedings
Publisher: SPIE
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1117/12.801424,
  title = {Study of second-generation Proximity Gap Suction Development System (PGSD-II) for mask fabrication},
  author = {Hideaki Sakurai and Masatoshi Terayama and Mari Sakai and Masamitsu Itoh and Osamu Ikenaga and Hideo Funakoshi and Norifumi Sato and Kenji Nakamizo and Masato Nomura and Yoshihiko Saito and Junji Nakao and Naoya Hayashi},
  year = {2008},
  journal = {SPIE Proceedings},
  doi = {10.1117/12.801424},
  url = {https://doi.org/10.1117/12.801424}
}

RIS

TY  - JOUR
TI  - Study of second-generation Proximity Gap Suction Development System (PGSD-II) for mask fabrication
AU  - Hideaki Sakurai
AU  - Masatoshi Terayama
AU  - Mari Sakai
AU  - Masamitsu Itoh
AU  - Osamu Ikenaga
AU  - Hideo Funakoshi
AU  - Norifumi Sato
AU  - Kenji Nakamizo
AU  - Masato Nomura
AU  - Yoshihiko Saito
AU  - Junji Nakao
AU  - Naoya Hayashi
PY  - 2008
JO  - SPIE Proceedings
DO  - 10.1117/12.801424
UR  - https://doi.org/10.1117/12.801424
ER  -

APA

Sakurai, H., Terayama, M., Sakai, M., Itoh, M., Ikenaga, O., Funakoshi, H., Sato, N., Nakamizo, K., Nomura, M., Saito, Y., Nakao, J., & Hayashi, N. (2008). Study of second-generation Proximity Gap Suction Development System (PGSD-II) for mask fabrication. SPIE Proceedings. https://doi.org/10.1117/12.801424

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crossref · retrieved 2026-09-27T07:24:29.072Z