Stress-induced ripping enables fabrication of nanopores with dimensions smaller than the resolution limit of the employed lithography

Xinxin Liu, Fabio De Ferrari, Kirill Khabarov, Maria Blanco Formoso, Saumey Jain, Anna Herland, Göran Stemme, Francesco De Angelis, Frank Niklaus

Open source

DOI
10.1126/sciadv.aee8946
Published
2026-08-21
Container
Science Advances
Publisher
American Association for the Advancement of Science (AAAS)
Open access
unknown

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BibTeX

@article{allodium:10.1126/sciadv.aee8946,
  title = {Stress-induced ripping enables fabrication of nanopores with dimensions smaller than the resolution limit of the employed lithography},
  author = {Xinxin Liu and Fabio De Ferrari and Kirill Khabarov and Maria Blanco Formoso and Saumey Jain and Anna Herland and Göran Stemme and Francesco De Angelis and Frank Niklaus},
  year = {2026},
  journal = {Science Advances},
  doi = {10.1126/sciadv.aee8946},
  url = {https://doi.org/10.1126/sciadv.aee8946}
}

RIS

TY  - JOUR
TI  - Stress-induced ripping enables fabrication of nanopores with dimensions smaller than the resolution limit of the employed lithography
AU  - Xinxin Liu
AU  - Fabio De Ferrari
AU  - Kirill Khabarov
AU  - Maria Blanco Formoso
AU  - Saumey Jain
AU  - Anna Herland
AU  - Göran Stemme
AU  - Francesco De Angelis
AU  - Frank Niklaus
PY  - 2026
JO  - Science Advances
DO  - 10.1126/sciadv.aee8946
UR  - https://doi.org/10.1126/sciadv.aee8946
ER  - 

APA

Liu, X., Ferrari, F. D., Khabarov, K., Formoso, M. B., Jain, S., Herland, A., Stemme, G., Angelis, F. D., & Niklaus, F. (2026). Stress-induced ripping enables fabrication of nanopores with dimensions smaller than the resolution limit of the employed lithography. Science Advances. https://doi.org/10.1126/sciadv.aee8946

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