Chemical Activity of Oxygen Atoms in Magnetron Sputter-Deposited ZnO Films during Film Growth

Aya Morita, Ikuo Watanabe, Naoki Ohta, Hajime Shirai

Open source

DOI
10.1143/jjap.50.08jd02
Published
2011-08-01
Container
Japanese Journal of Applied Physics
Publisher
IOP Publishing
Open access
unknown

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BibTeX

@article{allodium:10.1143/jjap.50.08jd02,
  title = {Chemical Activity of Oxygen Atoms in Magnetron Sputter-Deposited ZnO Films during Film Growth},
  author = {Aya Morita and Ikuo Watanabe and Naoki Ohta and Hajime Shirai},
  year = {2011},
  journal = {Japanese Journal of Applied Physics},
  doi = {10.1143/jjap.50.08jd02},
  url = {https://doi.org/10.1143/jjap.50.08jd02}
}

RIS

TY  - JOUR
TI  - Chemical Activity of Oxygen Atoms in Magnetron Sputter-Deposited ZnO Films during Film Growth
AU  - Aya Morita
AU  - Ikuo Watanabe
AU  - Naoki Ohta
AU  - Hajime Shirai
PY  - 2011
JO  - Japanese Journal of Applied Physics
DO  - 10.1143/jjap.50.08jd02
UR  - https://doi.org/10.1143/jjap.50.08jd02
ER  - 

APA

Morita, A., Watanabe, I., Ohta, N., & Shirai, H. (2011). Chemical Activity of Oxygen Atoms in Magnetron Sputter-Deposited ZnO Films during Film Growth. Japanese Journal of Applied Physics. https://doi.org/10.1143/jjap.50.08jd02

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