Remarkable Influence of molecular structure of N,N'-unsymmetrically substituted 1,3-amidinate and -guanidinate on the Volatility and the Thermal Stability of Precursors for HfO<sub>2</sub> Films via Liquid Injection-MOCVD
- DOI
- 10.1149/1.3207586
- Published
- 2009-09-25
- Container
- ECS Transactions
- Publisher
- The Electrochemical Society
- Open access
- unknown
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BibTeX
@article{allodium:10.1149/1.3207586,
title = {Remarkable Influence of molecular structure of N,N'-unsymmetrically substituted 1,3-amidinate and -guanidinate on the Volatility and the Thermal Stability of Precursors for HfO<sub>2</sub> Films via Liquid Injection-MOCVD},
author = {Mohamad Eleter and Stephane Daniele and Virginie Brize and Catherine Dubourdieu and Christophe Lachaud and Nicolas Blasco and Audrey Pinchart},
year = {2009},
journal = {ECS Transactions},
doi = {10.1149/1.3207586},
url = {https://doi.org/10.1149/1.3207586}
}RIS
TY - JOUR TI - Remarkable Influence of molecular structure of N,N'-unsymmetrically substituted 1,3-amidinate and -guanidinate on the Volatility and the Thermal Stability of Precursors for HfO<sub>2</sub> Films via Liquid Injection-MOCVD AU - Mohamad Eleter AU - Stephane Daniele AU - Virginie Brize AU - Catherine Dubourdieu AU - Christophe Lachaud AU - Nicolas Blasco AU - Audrey Pinchart PY - 2009 JO - ECS Transactions DO - 10.1149/1.3207586 UR - https://doi.org/10.1149/1.3207586 ER -
APA
Eleter, M., Daniele, S., Brize, V., Dubourdieu, C., Lachaud, C., Blasco, N., & Pinchart, A. (2009). Remarkable Influence of molecular structure of N,N'-unsymmetrically substituted 1,3-amidinate and -guanidinate on the Volatility and the Thermal Stability of Precursors for HfO<sub>2</sub> Films via Liquid Injection-MOCVD. ECS Transactions. https://doi.org/10.1149/1.3207586
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- crossref · retrieved 2026-11-09T04:21:40.522Z