Decomposition of Hexamethyldisilazane on Hot Metal Filaments and its Gas-phase Chemistry in a Hot-wire Chemical Vapor Deposition Reactor

Ampong, Eric

DOI: 10.11575/prism/36964
Published: 2019
Container: Not recorded
Publisher: Science
Open access: no

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Cite this work

BibTeX

@article{allodium:10.11575/prism/36964,
  title = {Decomposition of Hexamethyldisilazane on Hot Metal Filaments and its Gas-phase Chemistry in a Hot-wire Chemical Vapor Deposition Reactor},
  author = {Ampong, Eric},
  year = {2019},
  doi = {10.11575/prism/36964},
  url = {https://doi.org/10.11575/prism/36964}
}

RIS

TY  - JOUR
TI  - Decomposition of Hexamethyldisilazane on Hot Metal Filaments and its Gas-phase Chemistry in a Hot-wire Chemical Vapor Deposition Reactor
AU  - Ampong, Eric
PY  - 2019
DO  - 10.11575/prism/36964
UR  - https://doi.org/10.11575/prism/36964
ER  -

APA

Eric, A. (2019). Decomposition of Hexamethyldisilazane on Hot Metal Filaments and its Gas-phase Chemistry in a Hot-wire Chemical Vapor Deposition Reactor. https://doi.org/10.11575/prism/36964

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datacite · retrieved 2026-11-09T16:37:23.727Z