Thermal Decomposition In Situ Monitoring System of the Gas Phase Cyclopentadienyl Tris(dimethylamino) Zirconium (CpZr(NMe2)3) Based on FT-IR and QMS for Atomic Layer Deposition
- DOI
- 10.1186/s11671-020-03400-2
- Published
- 2020-09-04
- Container
- Nanoscale Research Letters
- Publisher
- Springer Science and Business Media LLC
- Open access
- unknown
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Cite this work
BibTeX
@article{allodium:10.1186/s11671-020-03400-2,
title = {Thermal Decomposition In Situ Monitoring System of the Gas Phase Cyclopentadienyl Tris(dimethylamino) Zirconium (CpZr(NMe2)3) Based on FT-IR and QMS for Atomic Layer Deposition},
author = {Jong-Ki An and Eunmi Choi and Seob Shim and Hayeong Kim and Goru Kang and Ju-Young Yun},
year = {2020},
journal = {Nanoscale Research Letters},
doi = {10.1186/s11671-020-03400-2},
url = {https://doi.org/10.1186/s11671-020-03400-2}
}RIS
TY - JOUR TI - Thermal Decomposition In Situ Monitoring System of the Gas Phase Cyclopentadienyl Tris(dimethylamino) Zirconium (CpZr(NMe2)3) Based on FT-IR and QMS for Atomic Layer Deposition AU - Jong-Ki An AU - Eunmi Choi AU - Seob Shim AU - Hayeong Kim AU - Goru Kang AU - Ju-Young Yun PY - 2020 JO - Nanoscale Research Letters DO - 10.1186/s11671-020-03400-2 UR - https://doi.org/10.1186/s11671-020-03400-2 ER -
APA
An, J., Choi, E., Shim, S., Kim, H., Kang, G., & Yun, J. (2020). Thermal Decomposition In Situ Monitoring System of the Gas Phase Cyclopentadienyl Tris(dimethylamino) Zirconium (CpZr(NMe2)3) Based on FT-IR and QMS for Atomic Layer Deposition. Nanoscale Research Letters. https://doi.org/10.1186/s11671-020-03400-2
Source records
- crossref · retrieved 2026-09-26T22:58:44.445Z