Thermal Decomposition In Situ Monitoring System of the Gas Phase Cyclopentadienyl Tris(dimethylamino) Zirconium (CpZr(NMe2)3) Based on FT-IR and QMS for Atomic Layer Deposition

Jong-Ki An, Eunmi Choi, Seob Shim, Hayeong Kim, Goru Kang, Ju-Young Yun

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DOI
10.1186/s11671-020-03400-2
Published
2020-09-04
Container
Nanoscale Research Letters
Publisher
Springer Science and Business Media LLC
Open access
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BibTeX

@article{allodium:10.1186/s11671-020-03400-2,
  title = {Thermal Decomposition In Situ Monitoring System of the Gas Phase Cyclopentadienyl Tris(dimethylamino) Zirconium (CpZr(NMe2)3) Based on FT-IR and QMS for Atomic Layer Deposition},
  author = {Jong-Ki An and Eunmi Choi and Seob Shim and Hayeong Kim and Goru Kang and Ju-Young Yun},
  year = {2020},
  journal = {Nanoscale Research Letters},
  doi = {10.1186/s11671-020-03400-2},
  url = {https://doi.org/10.1186/s11671-020-03400-2}
}

RIS

TY  - JOUR
TI  - Thermal Decomposition In Situ Monitoring System of the Gas Phase Cyclopentadienyl Tris(dimethylamino) Zirconium (CpZr(NMe2)3) Based on FT-IR and QMS for Atomic Layer Deposition
AU  - Jong-Ki An
AU  - Eunmi Choi
AU  - Seob Shim
AU  - Hayeong Kim
AU  - Goru Kang
AU  - Ju-Young Yun
PY  - 2020
JO  - Nanoscale Research Letters
DO  - 10.1186/s11671-020-03400-2
UR  - https://doi.org/10.1186/s11671-020-03400-2
ER  - 

APA

An, J., Choi, E., Shim, S., Kim, H., Kang, G., & Yun, J. (2020). Thermal Decomposition In Situ Monitoring System of the Gas Phase Cyclopentadienyl Tris(dimethylamino) Zirconium (CpZr(NMe2)3) Based on FT-IR and QMS for Atomic Layer Deposition. Nanoscale Research Letters. https://doi.org/10.1186/s11671-020-03400-2

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