SurfMon: a learning-based optical in-process surface monitoring system for topographical defects.

Liu M, Zhang S, Liu K, Hon B

DOI: 10.1364/ao.558661
Published: 2025 Jun 10
Container: Applied optics
Publisher: Not recorded
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1364/ao.558661,
  title = {SurfMon: a learning-based optical in-process surface monitoring system for topographical defects.},
  author = {Liu M and Zhang S and Liu K and Hon B},
  year = {2025},
  journal = {Applied optics},
  doi = {10.1364/ao.558661},
  url = {https://doi.org/10.1364/ao.558661}
}

RIS

TY  - JOUR
TI  - SurfMon: a learning-based optical in-process surface monitoring system for topographical defects.
AU  - Liu M
AU  - Zhang S
AU  - Liu K
AU  - Hon B
PY  - 2025
JO  - Applied optics
DO  - 10.1364/ao.558661
UR  - https://doi.org/10.1364/ao.558661
ER  -

APA

M, L., S, Z., K, L., & B, H. (2025). SurfMon: a learning-based optical in-process surface monitoring system for topographical defects.. Applied optics. https://doi.org/10.1364/ao.558661

Source records

pubmed · retrieved 2026-09-24T23:38:58.363Z