Optical, composition, durability, and environmental properties of the microwave plasma-assisted sputter-deposited silicon nitride.

Lindsay C, Garcia Nuñez C, Fleming L, Brinkley I, Pomfret J, Mazur M, Kot M, Zhu W, Saunders K, Reid S, Herguedas E, Redondo-Cubero A, Gibson D.

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DOI: 10.1364/ao.578043
Published: 2026-02-01
Container: Appl Opt
Publisher: Not recorded
Open access: no

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Cite this work

BibTeX

@article{allodium:10.1364/ao.578043,
  title = {Optical, composition, durability, and environmental properties of the microwave plasma-assisted sputter-deposited silicon nitride.},
  author = {Lindsay C and  Garcia Nuñez C and  Fleming L and  Brinkley I and  Pomfret J and  Mazur M and  Kot M and  Zhu W and  Saunders K and  Reid S and  Herguedas E and  Redondo-Cubero A and  Gibson D.},
  year = {2026},
  journal = {Appl Opt},
  doi = {10.1364/ao.578043},
  url = {https://doi.org/10.1364/ao.578043}
}

RIS

TY  - JOUR
TI  - Optical, composition, durability, and environmental properties of the microwave plasma-assisted sputter-deposited silicon nitride.
AU  - Lindsay C
AU  -  Garcia Nuñez C
AU  -  Fleming L
AU  -  Brinkley I
AU  -  Pomfret J
AU  -  Mazur M
AU  -  Kot M
AU  -  Zhu W
AU  -  Saunders K
AU  -  Reid S
AU  -  Herguedas E
AU  -  Redondo-Cubero A
AU  -  Gibson D.
PY  - 2026
JO  - Appl Opt
DO  - 10.1364/ao.578043
UR  - https://doi.org/10.1364/ao.578043
ER  -

APA

C, L., C, G. N., L, F., I, B., J, P., M, M., M, K., W, Z., K, S., S, R., E, H., A, R., & D., G. (2026). Optical, composition, durability, and environmental properties of the microwave plasma-assisted sputter-deposited silicon nitride.. Appl Opt. https://doi.org/10.1364/ao.578043

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europe-pmc · retrieved 2026-09-25T10:13:35.260Z