3D push-pull heterodyne interferometer for SPM metrology.

Kazieva TV, Gubskiy KL, Kuznetsov AP, Reshetov VN

DOI: 10.1364/ao.58.004000
Published: 2019 May 20
Container: Applied optics
Publisher: Not recorded
Open access: unknown

Credibility signals

limited evidence Score 43/100 under policy 1.0.0. This is a metadata assessment, not a judgment of the paper's conclusions.

Show all credibility signals

cautionDOI registered: No matching Crossref record was present in this response. Source: Crossref; license: CC0 metadata
cautionDOI resolves: No matching Crossref record was present in this response. Source: Crossref; license: CC0 metadata
not scoredDirectory of Open Access Journals: No matching DOAJ record was present in this response. No allow-list match; this is not evidence of low credibility. Source: DOAJ; license: CC0
not scoredMEDLINE indexed: Not checked or no result supplied; no credibility inference made. Source: No authority result supplied; license: Unknown
not scoredOpenAlex core source: Not checked or no result supplied; no credibility inference made. Source: No authority result supplied; license: Unknown
not scoredKnown publisher allow-list: Not checked or no result supplied; no credibility inference made. Source: No authority result supplied; license: Unknown
not scoredROR affiliation: Not checked or no result supplied; no credibility inference made. Source: No authority result supplied; license: Unknown
not scoredRetraction Watch retraction: No retraction notice matched this DOI in the deployed snapshot. No matching event found; coverage may be incomplete. Source: Retraction Watch; license: CC BY 4.0
not scoredRetraction Watch expression of concern: No expression of concern notice matched this DOI in the deployed snapshot. No matching event found; coverage may be incomplete. Source: Retraction Watch; license: CC BY 4.0
not scoredRetraction Watch correction: No correction notice matched this DOI in the deployed snapshot. No matching event found; coverage may be incomplete. Source: Retraction Watch; license: CC BY 4.0
not scoredRetraction Watch reinstatement: No reinstatement notice matched this DOI in the deployed snapshot. No matching event found; coverage may be incomplete. Source: Retraction Watch; license: CC BY 4.0
not scoredOpen access status: Not checked or no result supplied; no credibility inference made. Source: No authority result supplied; license: Unknown
not scoredPublication license: Not checked or no result supplied; no credibility inference made. Source: No authority result supplied; license: Unknown
not scoredPublication version: A publication version was supplied but is not scored. Source: Normalized work metadata; license: Caller-provided; provenance license not supplied to scorer
cautionMetadata completeness: 5 of 6 scored descriptive metadata groups are present; missing fields increase uncertainty. Source: Normalized work metadata; license: Caller-provided; provenance license not supplied to scorer

Cite this work

BibTeX

@article{allodium:10.1364/ao.58.004000,
  title = {3D push-pull heterodyne interferometer for SPM metrology.},
  author = {Kazieva TV and Gubskiy KL and Kuznetsov AP and Reshetov VN},
  year = {2019},
  journal = {Applied optics},
  doi = {10.1364/ao.58.004000},
  url = {https://doi.org/10.1364/ao.58.004000}
}

RIS

TY  - JOUR
TI  - 3D push-pull heterodyne interferometer for SPM metrology.
AU  - Kazieva TV
AU  - Gubskiy KL
AU  - Kuznetsov AP
AU  - Reshetov VN
PY  - 2019
JO  - Applied optics
DO  - 10.1364/ao.58.004000
UR  - https://doi.org/10.1364/ao.58.004000
ER  -

APA

TV, K., KL, G., AP, K., & VN, R. (2019). 3D push-pull heterodyne interferometer for SPM metrology.. Applied optics. https://doi.org/10.1364/ao.58.004000

Source records

pubmed · retrieved 2026-09-26T10:32:22.284Z