Spatiotemporal speckle in optical lithography via integrated speckle theory: interpretation and numerical modeling.

Shirai T

DOI: 10.1364/josaa.599809
Published: 2026 Jun 1
Container: Journal of the Optical Society of America. A, Optics, image science, and vision
Publisher: Not recorded
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1364/josaa.599809,
  title = {Spatiotemporal speckle in optical lithography via integrated speckle theory: interpretation and numerical modeling.},
  author = {Shirai T},
  year = {2026},
  journal = {Journal of the Optical Society of America. A, Optics, image science, and vision},
  doi = {10.1364/josaa.599809},
  url = {https://doi.org/10.1364/josaa.599809}
}

RIS

TY  - JOUR
TI  - Spatiotemporal speckle in optical lithography via integrated speckle theory: interpretation and numerical modeling.
AU  - Shirai T
PY  - 2026
JO  - Journal of the Optical Society of America. A, Optics, image science, and vision
DO  - 10.1364/josaa.599809
UR  - https://doi.org/10.1364/josaa.599809
ER  -

APA

T, S. (2026). Spatiotemporal speckle in optical lithography via integrated speckle theory: interpretation and numerical modeling.. Journal of the Optical Society of America. A, Optics, image science, and vision. https://doi.org/10.1364/josaa.599809

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pubmed · retrieved 2026-09-25T01:43:54.384Z