Silicon slotted photonic crystal cavities fabricated by deep-ultraviolet lithography

Thi Hong Cam Hoang, Thuy van Nguyen, Thanh Binh Pham, van Dai Pham, van Hoi Pham, Xavier Le Roux, Stephane Monfray, Frédéric Boeuf, Laurent Vivien, Eric Cassan, Carlos Alonso-Ramos

Open source

DOI: 10.1364/josab.430455
Published: 2021-09-13
Container: Journal of the Optical Society of America B
Publisher: Not recorded
Open access: yes

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Cite this work

BibTeX

@article{allodium:10.1364/josab.430455,
  title = {Silicon slotted photonic crystal cavities fabricated by deep-ultraviolet lithography},
  author = {Thi Hong Cam Hoang and Thuy van Nguyen and Thanh Binh Pham and van Dai Pham and van Hoi Pham and Xavier Le Roux and Stephane Monfray and Frédéric Boeuf and Laurent Vivien and Eric Cassan and Carlos Alonso-Ramos},
  year = {2021},
  journal = {Journal of the Optical Society of America B},
  doi = {10.1364/josab.430455},
  url = {https://doi.org/10.1364/josab.430455}
}

RIS

TY  - JOUR
TI  - Silicon slotted photonic crystal cavities fabricated by deep-ultraviolet lithography
AU  - Thi Hong Cam Hoang
AU  - Thuy van Nguyen
AU  - Thanh Binh Pham
AU  - van Dai Pham
AU  - van Hoi Pham
AU  - Xavier Le Roux
AU  - Stephane Monfray
AU  - Frédéric Boeuf
AU  - Laurent Vivien
AU  - Eric Cassan
AU  - Carlos Alonso-Ramos
PY  - 2021
JO  - Journal of the Optical Society of America B
DO  - 10.1364/josab.430455
UR  - https://doi.org/10.1364/josab.430455
ER  -

APA

Hoang, T. H. C., Nguyen, T. V., Pham, T. B., Pham, V. D., Pham, V. H., Roux, X. L., Monfray, S., Boeuf, F., Vivien, L., Cassan, E., & Alonso-Ramos, C. (2021). Silicon slotted photonic crystal cavities fabricated by deep-ultraviolet lithography. Journal of the Optical Society of America B. https://doi.org/10.1364/josab.430455

Source records

hal · retrieved 2026-09-24T21:01:19.923Z