Applicability of the Debye-Waller damping factor for the determination of the line-edge roughness of lamellar gratings.

Fernández Herrero A, Pflüger M, Probst J, Scholze F, Soltwisch V

DOI: 10.1364/oe.27.032490
Published: 2019 Oct 28
Container: Optics express
Publisher: Not recorded
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1364/oe.27.032490,
  title = {Applicability of the Debye-Waller damping factor for the determination of the line-edge roughness of lamellar gratings.},
  author = {Fernández Herrero A and Pflüger M and Probst J and Scholze F and Soltwisch V},
  year = {2019},
  journal = {Optics express},
  doi = {10.1364/oe.27.032490},
  url = {https://doi.org/10.1364/oe.27.032490}
}

RIS

TY  - JOUR
TI  - Applicability of the Debye-Waller damping factor for the determination of the line-edge roughness of lamellar gratings.
AU  - Fernández Herrero A
AU  - Pflüger M
AU  - Probst J
AU  - Scholze F
AU  - Soltwisch V
PY  - 2019
JO  - Optics express
DO  - 10.1364/oe.27.032490
UR  - https://doi.org/10.1364/oe.27.032490
ER  -

APA

A, F. H., M, P., J, P., F, S., & V, S. (2019). Applicability of the Debye-Waller damping factor for the determination of the line-edge roughness of lamellar gratings.. Optics express. https://doi.org/10.1364/oe.27.032490

Source records

pubmed · retrieved 2026-09-25T13:42:13.937Z