Physics-informed phase retrieval from a single interferogram for wafer surface measurement.

Xing Y, Hua T, Xing J, Yang J, Wang Y, Liu J

DOI: 10.1364/oe.610317
Published: 2026 Oct 5
Container: Optics express
Publisher: Not recorded
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1364/oe.610317,
  title = {Physics-informed phase retrieval from a single interferogram for wafer surface measurement.},
  author = {Xing Y and Hua T and Xing J and Yang J and Wang Y and Liu J},
  year = {2026},
  journal = {Optics express},
  doi = {10.1364/oe.610317},
  url = {https://doi.org/10.1364/oe.610317}
}

RIS

TY  - JOUR
TI  - Physics-informed phase retrieval from a single interferogram for wafer surface measurement.
AU  - Xing Y
AU  - Hua T
AU  - Xing J
AU  - Yang J
AU  - Wang Y
AU  - Liu J
PY  - 2026
JO  - Optics express
DO  - 10.1364/oe.610317
UR  - https://doi.org/10.1364/oe.610317
ER  -

APA

Y, X., T, H., J, X., J, Y., Y, W., & J, L. (2026). Physics-informed phase retrieval from a single interferogram for wafer surface measurement.. Optics express. https://doi.org/10.1364/oe.610317

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pubmed · retrieved 2026-11-10T06:53:45.742Z