Reference-guided defocus estimation enables physics-guided image restoration in deep ultraviolet wafer microscopy.

Guo X, Wang Y, Ming M

DOI: 10.1364/oe.616126
Published: 2026 Oct 19
Container: Optics express
Publisher: Not recorded
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1364/oe.616126,
  title = {Reference-guided defocus estimation enables physics-guided image restoration in deep ultraviolet wafer microscopy.},
  author = {Guo X and Wang Y and Ming M},
  year = {2026},
  journal = {Optics express},
  doi = {10.1364/oe.616126},
  url = {https://doi.org/10.1364/oe.616126}
}

RIS

TY  - JOUR
TI  - Reference-guided defocus estimation enables physics-guided image restoration in deep ultraviolet wafer microscopy.
AU  - Guo X
AU  - Wang Y
AU  - Ming M
PY  - 2026
JO  - Optics express
DO  - 10.1364/oe.616126
UR  - https://doi.org/10.1364/oe.616126
ER  -

APA

X, G., Y, W., & M, M. (2026). Reference-guided defocus estimation enables physics-guided image restoration in deep ultraviolet wafer microscopy.. Optics express. https://doi.org/10.1364/oe.616126

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pubmed · retrieved 2026-11-10T07:04:22.364Z