Performance enhancement in micro-LED maskless lithography via in-situ two-photon-polymerized micro-lens arrays.

Meng X, Dai G, Yang L, Yin L, Zhang J

DOI: 10.1364/ol.612893
Published: 2026 Oct 1
Container: Optics letters
Publisher: Not recorded
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1364/ol.612893,
  title = {Performance enhancement in micro-LED maskless lithography via in-situ two-photon-polymerized micro-lens arrays.},
  author = {Meng X and Dai G and Yang L and Yin L and Zhang J},
  year = {2026},
  journal = {Optics letters},
  doi = {10.1364/ol.612893},
  url = {https://doi.org/10.1364/ol.612893}
}

RIS

TY  - JOUR
TI  - Performance enhancement in micro-LED maskless lithography via in-situ two-photon-polymerized micro-lens arrays.
AU  - Meng X
AU  - Dai G
AU  - Yang L
AU  - Yin L
AU  - Zhang J
PY  - 2026
JO  - Optics letters
DO  - 10.1364/ol.612893
UR  - https://doi.org/10.1364/ol.612893
ER  -

APA

X, M., G, D., L, Y., L, Y., & J, Z. (2026). Performance enhancement in micro-LED maskless lithography via in-situ two-photon-polymerized micro-lens arrays.. Optics letters. https://doi.org/10.1364/ol.612893

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pubmed · retrieved 2026-11-10T06:47:11.302Z