Deuterated SiNx: a low‐loss, back‐end CMOS‐compatible platform for nonlinear integrated optics

Xavier X. Chia, Dawn T. H. Tan

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DOI: 10.1515/nanoph-2022-0626
Published: 2023-02-13
Container: Nanophotonics
Publisher: Wiley
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1515/nanoph-2022-0626,
  title = {Deuterated SiNx: a low‐loss, back‐end CMOS‐compatible platform for nonlinear integrated optics},
  author = {Xavier X. Chia and Dawn T. H. Tan},
  year = {2023},
  journal = {Nanophotonics},
  doi = {10.1515/nanoph-2022-0626},
  url = {https://doi.org/10.1515/nanoph-2022-0626}
}

RIS

TY  - JOUR
TI  - Deuterated SiNx: a low‐loss, back‐end CMOS‐compatible platform for nonlinear integrated optics
AU  - Xavier X. Chia
AU  - Dawn T. H. Tan
PY  - 2023
JO  - Nanophotonics
DO  - 10.1515/nanoph-2022-0626
UR  - https://doi.org/10.1515/nanoph-2022-0626
ER  -

APA

Chia, X. X., & Tan, D. T. H. (2023). Deuterated SiNx: a low‐loss, back‐end CMOS‐compatible platform for nonlinear integrated optics. Nanophotonics. https://doi.org/10.1515/nanoph-2022-0626

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crossref · retrieved 2026-11-06T22:12:26.387Z