Micro-Fabrication Technology for Piezoelectric Film Formationand its Application to MEMS

Masaaki Ichiki, Jiunn-Jye Tsaur, Lulu Zhang, Zhang-Jie Wang, Ryutaro Maeda

Open source

DOI: 10.1541/ieejsmas.123.560
Published: 2003
Container: IEEJ Transactions on Sensors and Micromachines
Publisher: Institute of Electrical Engineers of Japan (IEE Japan)
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1541/ieejsmas.123.560,
  title = {Micro-Fabrication Technology for Piezoelectric Film Formationand its Application to MEMS},
  author = {Masaaki Ichiki and Jiunn-Jye Tsaur and Lulu Zhang and Zhang-Jie Wang and Ryutaro Maeda},
  year = {2003},
  journal = {IEEJ Transactions on Sensors and Micromachines},
  doi = {10.1541/ieejsmas.123.560},
  url = {https://doi.org/10.1541/ieejsmas.123.560}
}

RIS

TY  - JOUR
TI  - Micro-Fabrication Technology for Piezoelectric Film Formationand its Application to MEMS
AU  - Masaaki Ichiki
AU  - Jiunn-Jye Tsaur
AU  - Lulu Zhang
AU  - Zhang-Jie Wang
AU  - Ryutaro Maeda
PY  - 2003
JO  - IEEJ Transactions on Sensors and Micromachines
DO  - 10.1541/ieejsmas.123.560
UR  - https://doi.org/10.1541/ieejsmas.123.560
ER  -

APA

Ichiki, M., Tsaur, J., Zhang, L., Wang, Z., & Maeda, R. (2003). Micro-Fabrication Technology for Piezoelectric Film Formationand its Application to MEMS. IEEJ Transactions on Sensors and Micromachines. https://doi.org/10.1541/ieejsmas.123.560

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crossref · retrieved 2026-09-27T05:00:27.812Z