Study on repairing surface defects of quartz crucible used for drawing monocrystalline silicon by chemical mechanical grinding

Xiangxiang Cui, Tianlu Wei, Xingqiang Chen, Yinghui Fang, Hai Yang, Xingfei Zhu, Xinyu Qi

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DOI: 10.21203/rs.3.rs-10147197/v1
Published: 2026-08-13
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Publisher: Springer Science and Business Media LLC
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.21203/rs.3.rs-10147197/v1,
  title = {Study on repairing surface defects of quartz crucible used for drawing monocrystalline silicon by chemical mechanical grinding},
  author = {Xiangxiang Cui and Tianlu Wei and Xingqiang Chen and Yinghui Fang and Hai Yang and Xingfei Zhu and Xinyu Qi},
  year = {2026},
  doi = {10.21203/rs.3.rs-10147197/v1},
  url = {https://doi.org/10.21203/rs.3.rs-10147197/v1}
}

RIS

TY  - JOUR
TI  - Study on repairing surface defects of quartz crucible used for drawing monocrystalline silicon by chemical mechanical grinding
AU  - Xiangxiang Cui
AU  - Tianlu Wei
AU  - Xingqiang Chen
AU  - Yinghui Fang
AU  - Hai Yang
AU  - Xingfei Zhu
AU  - Xinyu Qi
PY  - 2026
DO  - 10.21203/rs.3.rs-10147197/v1
UR  - https://doi.org/10.21203/rs.3.rs-10147197/v1
ER  -

APA

Cui, X., Wei, T., Chen, X., Fang, Y., Yang, H., Zhu, X., & Qi, X. (2026). Study on repairing surface defects of quartz crucible used for drawing monocrystalline silicon by chemical mechanical grinding. https://doi.org/10.21203/rs.3.rs-10147197/v1

Source records

crossref · retrieved 2026-09-25T14:47:55.994Z