Monolithic Integration of Piezo-Optomechanical Photonics and CMOS Electronics

Zimmermann M, Zhai A, Leenheer A, Boyle J, Mishra M, Dominguez D, Koppa M, Jehle W, Panuski C, Dong M, Gilbert G, Englund D, Eichenfield M.

Open source

DOI: 10.21203/rs.3.rs-10221147/v1
Published: 2026-07-15
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Publisher: Not recorded
Open access: no

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Cite this work

BibTeX

@article{allodium:10.21203/rs.3.rs-10221147/v1,
  title = {Monolithic Integration of Piezo-Optomechanical Photonics and CMOS Electronics},
  author = {Zimmermann M and  Zhai A and  Leenheer A and  Boyle J and  Mishra M and  Dominguez D and  Koppa M and  Jehle W and  Panuski C and  Dong M and  Gilbert G and  Englund D and  Eichenfield M.},
  year = {2026},
  doi = {10.21203/rs.3.rs-10221147/v1},
  url = {https://doi.org/10.21203/rs.3.rs-10221147/v1}
}

RIS

TY  - JOUR
TI  - Monolithic Integration of Piezo-Optomechanical Photonics and CMOS Electronics
AU  - Zimmermann M
AU  -  Zhai A
AU  -  Leenheer A
AU  -  Boyle J
AU  -  Mishra M
AU  -  Dominguez D
AU  -  Koppa M
AU  -  Jehle W
AU  -  Panuski C
AU  -  Dong M
AU  -  Gilbert G
AU  -  Englund D
AU  -  Eichenfield M.
PY  - 2026
DO  - 10.21203/rs.3.rs-10221147/v1
UR  - https://doi.org/10.21203/rs.3.rs-10221147/v1
ER  -

APA

M, Z., A, Z., A, L., J, B., M, M., D, D., M, K., W, J., C, P., M, D., G, G., D, E., & M., E. (2026). Monolithic Integration of Piezo-Optomechanical Photonics and CMOS Electronics. https://doi.org/10.21203/rs.3.rs-10221147/v1

Source records

europe-pmc · retrieved 2026-11-10T14:43:44.251Z