Room-Temperature and Atmospheric-Pressure Direct Wafer Bonding without Stringent Pretreatments Using Ultrafast Lasers

Xianlong Wei, Taoyuan Zhu, Zhenyu Hu, Qiaohui Yang, Yuqiang Yu, Ruixue Ding, Weilong Wu, Bingjie Wang, Duo Pan, Jingbiao Chen, Zhiwei Li

Open source

DOI
10.21203/rs.3.rs-9881361/v1
Published
2026-06-02
Container
Not recorded
Publisher
Springer Science and Business Media LLC
Open access
unknown

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BibTeX

@article{allodium:10.21203/rs.3.rs-9881361/v1,
  title = {Room-Temperature and Atmospheric-Pressure Direct Wafer Bonding without Stringent Pretreatments Using Ultrafast Lasers},
  author = {Xianlong Wei and Taoyuan Zhu and Zhenyu Hu and Qiaohui Yang and Yuqiang Yu and Ruixue Ding and Weilong Wu and Bingjie Wang and Duo Pan and Jingbiao Chen and Zhiwei Li},
  year = {2026},
  doi = {10.21203/rs.3.rs-9881361/v1},
  url = {https://doi.org/10.21203/rs.3.rs-9881361/v1}
}

RIS

TY  - JOUR
TI  - Room-Temperature and Atmospheric-Pressure Direct Wafer Bonding without Stringent Pretreatments Using Ultrafast Lasers
AU  - Xianlong Wei
AU  - Taoyuan Zhu
AU  - Zhenyu Hu
AU  - Qiaohui Yang
AU  - Yuqiang Yu
AU  - Ruixue Ding
AU  - Weilong Wu
AU  - Bingjie Wang
AU  - Duo Pan
AU  - Jingbiao Chen
AU  - Zhiwei Li
PY  - 2026
DO  - 10.21203/rs.3.rs-9881361/v1
UR  - https://doi.org/10.21203/rs.3.rs-9881361/v1
ER  - 

APA

Wei, X., Zhu, T., Hu, Z., Yang, Q., Yu, Y., Ding, R., Wu, W., Wang, B., Pan, D., Chen, J., & Li, Z. (2026). Room-Temperature and Atmospheric-Pressure Direct Wafer Bonding without Stringent Pretreatments Using Ultrafast Lasers. https://doi.org/10.21203/rs.3.rs-9881361/v1

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