Integrated microelectrode pore cavity device in silicon (111)

Nguyen, Quoc Hung, Tornow, Marc, :unav

DOI: 10.24406/publica-7360
Published: 2026
Container: Not recorded
Publisher: Fraunhofer-Gesellschaft
Open access: no

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Cite this work

BibTeX

@article{allodium:10.24406/publica-7360,
  title = {Integrated microelectrode pore cavity device in silicon (111)},
  author = {Nguyen, Quoc Hung and Tornow, Marc and :unav},
  year = {2026},
  doi = {10.24406/publica-7360},
  url = {https://doi.org/10.24406/publica-7360}
}

RIS

TY  - JOUR
TI  - Integrated microelectrode pore cavity device in silicon (111)
AU  - Nguyen, Quoc Hung
AU  - Tornow, Marc
AU  - :unav
PY  - 2026
DO  - 10.24406/publica-7360
UR  - https://doi.org/10.24406/publica-7360
ER  -

APA

Hung, N. Q., Marc, T., & :unav (2026). Integrated microelectrode pore cavity device in silicon (111). https://doi.org/10.24406/publica-7360

Source records

datacite · retrieved 2026-11-08T13:18:50.401Z