Optimizing CMOS-compatible, superconducting titanium nitride resonators: Deposition conditions and structuring processes

Lang, Simon, Schewski, Alexandra, Eisele, Ignaz, Weber, Josef, Morán Guizán, Carla, Luo, Zhen, Singer, Moritz, Schoof, Benedikt, Tornow, Marc, Mayer, Thomas, Zahn, Daniela, Pereira, Rui, Kutter, Christoph, :unav

Open source

DOI: 10.24406/publica-9629
Published: 2026
Container: Not recorded
Publisher: Fraunhofer-Gesellschaft
Open access: no

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Cite this work

BibTeX

@article{allodium:10.24406/publica-9629,
  title = {Optimizing CMOS-compatible, superconducting titanium nitride resonators: Deposition conditions and structuring processes},
  author = {Lang, Simon and Schewski, Alexandra and Eisele, Ignaz and Weber, Josef and Morán Guizán, Carla and Luo, Zhen and Singer, Moritz and Schoof, Benedikt and Tornow, Marc and Mayer, Thomas and Zahn, Daniela and Pereira, Rui and Kutter, Christoph and :unav},
  year = {2026},
  doi = {10.24406/publica-9629},
  url = {https://doi.org/10.24406/publica-9629}
}

RIS

TY  - JOUR
TI  - Optimizing CMOS-compatible, superconducting titanium nitride resonators: Deposition conditions and structuring processes
AU  - Lang, Simon
AU  - Schewski, Alexandra
AU  - Eisele, Ignaz
AU  - Weber, Josef
AU  - Morán Guizán, Carla
AU  - Luo, Zhen
AU  - Singer, Moritz
AU  - Schoof, Benedikt
AU  - Tornow, Marc
AU  - Mayer, Thomas
AU  - Zahn, Daniela
AU  - Pereira, Rui
AU  - Kutter, Christoph
AU  - :unav
PY  - 2026
DO  - 10.24406/publica-9629
UR  - https://doi.org/10.24406/publica-9629
ER  -

APA

Simon, L., Alexandra, S., Ignaz, E., Josef, W., Carla, M. G., Zhen, L., Moritz, S., Benedikt, S., Marc, T., Thomas, M., Daniela, Z., Rui, P., Christoph, K., & :unav (2026). Optimizing CMOS-compatible, superconducting titanium nitride resonators: Deposition conditions and structuring processes. https://doi.org/10.24406/publica-9629

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datacite · retrieved 2026-11-09T05:31:57.826Z