Fabrication of an Electron Beam Deposited AFM Tip and Observation of Submicron Line and Space Pattern.

Kazuyoshi SUGIHARA, Yoshiaki AKAMA, Eiji NISHIMURA, Akira SAKAI

Open source

DOI: 10.2493/jjspe.60.673
Published: 1994
Container: Journal of the Japan Society for Precision Engineering
Publisher: Japan Society for Precision Engineering
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.2493/jjspe.60.673,
  title = {Fabrication of an Electron Beam Deposited AFM Tip and Observation of Submicron Line and Space Pattern.},
  author = {Kazuyoshi SUGIHARA and Yoshiaki AKAMA and Eiji NISHIMURA and Akira SAKAI},
  year = {1994},
  journal = {Journal of the Japan Society for Precision Engineering},
  doi = {10.2493/jjspe.60.673},
  url = {https://doi.org/10.2493/jjspe.60.673}
}

RIS

TY  - JOUR
TI  - Fabrication of an Electron Beam Deposited AFM Tip and Observation of Submicron Line and Space Pattern.
AU  - Kazuyoshi SUGIHARA
AU  - Yoshiaki AKAMA
AU  - Eiji NISHIMURA
AU  - Akira SAKAI
PY  - 1994
JO  - Journal of the Japan Society for Precision Engineering
DO  - 10.2493/jjspe.60.673
UR  - https://doi.org/10.2493/jjspe.60.673
ER  -

APA

SUGIHARA, K., AKAMA, Y., NISHIMURA, E., & SAKAI, A. (1994). Fabrication of an Electron Beam Deposited AFM Tip and Observation of Submicron Line and Space Pattern.. Journal of the Japan Society for Precision Engineering. https://doi.org/10.2493/jjspe.60.673

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crossref · retrieved 2026-09-27T16:34:45.961Z