Novel Time-of-Flight Residual Gas Analyzer (TOF-RGA) for in situ Real-time Process Monitoring.

Gasc S, Hofer L

DOI: 10.2533/chimia.2022.52
Published: 2022 Feb 23
Container: Chimia
Publisher: Not recorded
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.2533/chimia.2022.52,
  title = {Novel Time-of-Flight Residual Gas Analyzer (TOF-RGA) for in situ Real-time Process Monitoring.},
  author = {Gasc S and Hofer L},
  year = {2022},
  journal = {Chimia},
  doi = {10.2533/chimia.2022.52},
  url = {https://doi.org/10.2533/chimia.2022.52}
}

RIS

TY  - JOUR
TI  - Novel Time-of-Flight Residual Gas Analyzer (TOF-RGA) for in situ Real-time Process Monitoring.
AU  - Gasc S
AU  - Hofer L
PY  - 2022
JO  - Chimia
DO  - 10.2533/chimia.2022.52
UR  - https://doi.org/10.2533/chimia.2022.52
ER  -

APA

S, G., & L, H. (2022). Novel Time-of-Flight Residual Gas Analyzer (TOF-RGA) for in situ Real-time Process Monitoring.. Chimia. https://doi.org/10.2533/chimia.2022.52

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pubmed · retrieved 2026-09-26T09:36:07.077Z