ULTRAFAST NANOSCALE PATTERNING SYSTEM: SURFING SCANNING PROBE LITHOGRAPHY

Yao, Bojing

DOI: 10.25394/pgs.19652616.v1
Published: 2022
Container: Not recorded
Publisher: Purdue University Graduate School
Open access: yes

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Cite this work

BibTeX

@article{allodium:10.25394/pgs.19652616.v1,
  title = {ULTRAFAST NANOSCALE PATTERNING SYSTEM: SURFING SCANNING PROBE LITHOGRAPHY},
  author = {Yao, Bojing},
  year = {2022},
  doi = {10.25394/pgs.19652616.v1},
  url = {https://doi.org/10.25394/pgs.19652616.v1}
}

RIS

TY  - JOUR
TI  - ULTRAFAST NANOSCALE PATTERNING SYSTEM: SURFING SCANNING PROBE LITHOGRAPHY
AU  - Yao, Bojing
PY  - 2022
DO  - 10.25394/pgs.19652616.v1
UR  - https://doi.org/10.25394/pgs.19652616.v1
ER  -

APA

Bojing, Y. (2022). ULTRAFAST NANOSCALE PATTERNING SYSTEM: SURFING SCANNING PROBE LITHOGRAPHY. https://doi.org/10.25394/pgs.19652616.v1

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datacite · retrieved 2026-09-26T07:38:56.402Z