An Automated Magnetron Sputtering Chamber for Ferroelectric Thin Film Deposition

Darren Pagan, Ian Mercer, Jon-Paul Maria, Kevin Dressler, Ric Wilburn, Susan E Trolier-Mckinstry, Stanislav Udovenko, Sarah Olandt

Open source

DOI: 10.26207/vnh1-wf39
Published: 2026
Container: Not recorded
Publisher: scholarsphere
Open access: no

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Cite this work

BibTeX

@article{allodium:10.26207/vnh1-wf39,
  title = {An Automated Magnetron Sputtering Chamber for Ferroelectric Thin Film Deposition},
  author = {Darren Pagan and Ian Mercer and Jon-Paul Maria and Kevin Dressler and Ric Wilburn and Susan E Trolier-Mckinstry and Stanislav Udovenko and Sarah Olandt},
  year = {2026},
  doi = {10.26207/vnh1-wf39},
  url = {https://doi.org/10.26207/vnh1-wf39}
}

RIS

TY  - JOUR
TI  - An Automated Magnetron Sputtering Chamber for Ferroelectric Thin Film Deposition
AU  - Darren Pagan
AU  - Ian Mercer
AU  - Jon-Paul Maria
AU  - Kevin Dressler
AU  - Ric Wilburn
AU  - Susan E Trolier-Mckinstry
AU  - Stanislav Udovenko
AU  - Sarah Olandt
PY  - 2026
DO  - 10.26207/vnh1-wf39
UR  - https://doi.org/10.26207/vnh1-wf39
ER  -

APA

Pagan, D., Mercer, I., Maria, J., Dressler, K., Wilburn, R., Trolier-Mckinstry, S. E., Udovenko, S., & Olandt, S. (2026). An Automated Magnetron Sputtering Chamber for Ferroelectric Thin Film Deposition. https://doi.org/10.26207/vnh1-wf39

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datacite · retrieved 2026-11-10T09:42:00.590Z