A concept of plasma source for producing an impurity-free, low-energy ion beam by using a string-plasma.

S. Harakawa, T. Noguchi, T. Tanikawa, K. Takayama

Open source

DOI
10.2978/jsas.2.3_194
Published
1990
Container
Journal of Advanced Science
Publisher
Society of Advanced Science
Open access
unknown

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BibTeX

@article{allodium:10.2978/jsas.2.3_194,
  title = {A concept of plasma source for producing an impurity-free, low-energy ion beam by using a string-plasma.},
  author = {S. Harakawa and T. Noguchi and T. Tanikawa and K. Takayama},
  year = {1990},
  journal = {Journal of Advanced Science},
  doi = {10.2978/jsas.2.3_194},
  url = {https://doi.org/10.2978/jsas.2.3_194}
}

RIS

TY  - JOUR
TI  - A concept of plasma source for producing an impurity-free, low-energy ion beam by using a string-plasma.
AU  - S. Harakawa
AU  - T. Noguchi
AU  - T. Tanikawa
AU  - K. Takayama
PY  - 1990
JO  - Journal of Advanced Science
DO  - 10.2978/jsas.2.3_194
UR  - https://doi.org/10.2978/jsas.2.3_194
ER  - 

APA

Harakawa, S., Noguchi, T., Tanikawa, T., & Takayama, K. (1990). A concept of plasma source for producing an impurity-free, low-energy ion beam by using a string-plasma.. Journal of Advanced Science. https://doi.org/10.2978/jsas.2.3_194

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