CVD Elaboration of 3C-SiC on AlN/Si Heterostructures: Structural Trends and Evolution during Growth

Marc Portail, Eric Frayssinet, Adrien Michon, Stéphanie Rennesson, Fabrice Semond, Aimeric Courville, Marcin Zielinski, Remi Comyn, Luan Nguyen, Yvon Cordier, Philippe Vennéguès

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DOI: 10.3390/cryst12111605
Published: 2022-11-10
Container: Crystals
Publisher: MDPI AG
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.3390/cryst12111605,
  title = {CVD Elaboration of 3C-SiC on AlN/Si Heterostructures: Structural Trends and Evolution during Growth},
  author = {Marc Portail and Eric Frayssinet and Adrien Michon and Stéphanie Rennesson and Fabrice Semond and Aimeric Courville and Marcin Zielinski and Remi Comyn and Luan Nguyen and Yvon Cordier and Philippe Vennéguès},
  year = {2022},
  journal = {Crystals},
  doi = {10.3390/cryst12111605},
  url = {https://doi.org/10.3390/cryst12111605}
}

RIS

TY  - JOUR
TI  - CVD Elaboration of 3C-SiC on AlN/Si Heterostructures: Structural Trends and Evolution during Growth
AU  - Marc Portail
AU  - Eric Frayssinet
AU  - Adrien Michon
AU  - Stéphanie Rennesson
AU  - Fabrice Semond
AU  - Aimeric Courville
AU  - Marcin Zielinski
AU  - Remi Comyn
AU  - Luan Nguyen
AU  - Yvon Cordier
AU  - Philippe Vennéguès
PY  - 2022
JO  - Crystals
DO  - 10.3390/cryst12111605
UR  - https://doi.org/10.3390/cryst12111605
ER  -

APA

Portail, M., Frayssinet, E., Michon, A., Rennesson, S., Semond, F., Courville, A., Zielinski, M., Comyn, R., Nguyen, L., Cordier, Y., & Vennéguès, P. (2022). CVD Elaboration of 3C-SiC on AlN/Si Heterostructures: Structural Trends and Evolution during Growth. Crystals. https://doi.org/10.3390/cryst12111605

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crossref · retrieved 2026-09-26T10:03:35.087Z