Through-Silicon via Device Non-Destructive Defect Evaluation Using Ultra-High-Resolution Acoustic Microscopy System.

Kim TH, Kang D, Kim JN, Park IK

Open source

DOI
10.3390/ma16020860
Published
2023 Jan 16
Container
Materials (Basel, Switzerland)
Publisher
Not recorded
Open access
yes

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BibTeX

@article{allodium:10.3390/ma16020860,
  title = {Through-Silicon via Device Non-Destructive Defect Evaluation Using Ultra-High-Resolution Acoustic Microscopy System.},
  author = {Kim TH and Kang D and Kim JN and Park IK},
  year = {2023},
  journal = {Materials (Basel, Switzerland)},
  doi = {10.3390/ma16020860},
  url = {https://doi.org/10.3390/ma16020860}
}

RIS

TY  - JOUR
TI  - Through-Silicon via Device Non-Destructive Defect Evaluation Using Ultra-High-Resolution Acoustic Microscopy System.
AU  - Kim TH
AU  - Kang D
AU  - Kim JN
AU  - Park IK
PY  - 2023
JO  - Materials (Basel, Switzerland)
DO  - 10.3390/ma16020860
UR  - https://doi.org/10.3390/ma16020860
ER  - 

APA

TH, K., D, K., JN, K., & IK, P. (2023). Through-Silicon via Device Non-Destructive Defect Evaluation Using Ultra-High-Resolution Acoustic Microscopy System.. Materials (Basel, Switzerland). https://doi.org/10.3390/ma16020860

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