Impact of Doping on Cross-Sectional Stress Assessment of 3C-SiC/Si Heteroepitaxy.

Scuderi V, Zielinski M, La Via F

DOI: 10.3390/ma16103824
Published: 2023 May 18
Container: Materials (Basel, Switzerland)
Publisher: Not recorded
Open access: yes

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Cite this work

BibTeX

@article{allodium:10.3390/ma16103824,
  title = {Impact of Doping on Cross-Sectional Stress Assessment of 3C-SiC/Si Heteroepitaxy.},
  author = {Scuderi V and Zielinski M and La Via F},
  year = {2023},
  journal = {Materials (Basel, Switzerland)},
  doi = {10.3390/ma16103824},
  url = {https://doi.org/10.3390/ma16103824}
}

RIS

TY  - JOUR
TI  - Impact of Doping on Cross-Sectional Stress Assessment of 3C-SiC/Si Heteroepitaxy.
AU  - Scuderi V
AU  - Zielinski M
AU  - La Via F
PY  - 2023
JO  - Materials (Basel, Switzerland)
DO  - 10.3390/ma16103824
UR  - https://doi.org/10.3390/ma16103824
ER  -

APA

V, S., M, Z., & F, L. V. (2023). Impact of Doping on Cross-Sectional Stress Assessment of 3C-SiC/Si Heteroepitaxy.. Materials (Basel, Switzerland). https://doi.org/10.3390/ma16103824

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pubmed · retrieved 2026-09-26T09:11:33.439Z