The Influence of Reactive Ion Etching Chemistry on the Initial Resistance and Cycling Stability of Line-Type (Bridge) Phase-Change Memory Devices.

Espiari A, Padberg H, Kiehn A, Schnieders K, Zhang J, Mussler G, Wiefels S, Jalil AR, Grützmacher D

Open source

DOI
10.3390/ma18204681
Published
2025 Oct 12
Container
Materials (Basel, Switzerland)
Publisher
Not recorded
Open access
yes

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BibTeX

@article{allodium:10.3390/ma18204681,
  title = {The Influence of Reactive Ion Etching Chemistry on the Initial Resistance and Cycling Stability of Line-Type (Bridge) Phase-Change Memory Devices.},
  author = {Espiari A and Padberg H and Kiehn A and Schnieders K and Zhang J and Mussler G and Wiefels S and Jalil AR and Grützmacher D},
  year = {2025},
  journal = {Materials (Basel, Switzerland)},
  doi = {10.3390/ma18204681},
  url = {https://doi.org/10.3390/ma18204681}
}

RIS

TY  - JOUR
TI  - The Influence of Reactive Ion Etching Chemistry on the Initial Resistance and Cycling Stability of Line-Type (Bridge) Phase-Change Memory Devices.
AU  - Espiari A
AU  - Padberg H
AU  - Kiehn A
AU  - Schnieders K
AU  - Zhang J
AU  - Mussler G
AU  - Wiefels S
AU  - Jalil AR
AU  - Grützmacher D
PY  - 2025
JO  - Materials (Basel, Switzerland)
DO  - 10.3390/ma18204681
UR  - https://doi.org/10.3390/ma18204681
ER  - 

APA

A, E., H, P., A, K., K, S., J, Z., G, M., S, W., AR, J., & D, G. (2025). The Influence of Reactive Ion Etching Chemistry on the Initial Resistance and Cycling Stability of Line-Type (Bridge) Phase-Change Memory Devices.. Materials (Basel, Switzerland). https://doi.org/10.3390/ma18204681

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